Sacramento, CA – Genesis Vacuum Technologies announces the release of the HC 70 Compressor. Ideal for multiple cryopump applications, the HC 70 supplies compressed helium to as many as three 10” (250 mm) and up to four 4” (100 mm) cryopumps.  With a cooling capacity of 6 kW and a helium flow rate of 65 SCFM (standard cubic feet per minute), this clean, quiet, reliable, and cost-effective compressor significantly improves cryopump performance. 

The HC 70 is constructed with a scroll compressor capsule, which significantly decreases oil contamination common with rotary compressor designs. Scroll compressor technology provides simultaneous suction, compression, and discharge, while reducing vibration and noise. Operating costs are also reduced due to a maintenance interval of 3 years. 

“The HC 70 compressor shows our commitment to providing our customers with consistent, cost-competitive solutions to their vacuum technology needs,” explained Karl Benjamin, Engineering Manager, Genesis Vacuum Technologies. “The scroll compressor capsule allows us to offer a system that accommodates multiple cryopumps in a cleaner and quieter operating environment.”

Genesis Vacuum Technologies’ compressors and cryopumps are used to create ultra-high vacuum conditions where high levels of cleanliness are required.  In the semiconductor industry, their systems can be found in advanced wafer processing equipment, such as physical vapor deposition (PVD) and Ion implanters. 

The HC 70 is smaller than competitive models, measuring 23.5” (575.8 mm) x 19.5” (495.3 mm) x 21” (531 mm).  Requiring standard power inputs, the water-cooled heat exchanger provides the cooling capacity to remove a heat load of up to 6 kW.  The scroll capsule technology minimizes noise to a maximum of 70 dBA. Additionally, the HC 70 holds S2 and CE certifications.

Genesis Vacuum Technologies is a manufacturer of leading-edge cryogenic vacuum pumps, compressors, and cryogenic coldheads used for generating ultra-high vacuum conditions in environments requiring high levels of cleanliness, such as in the semiconductor and disk drive industries. In the semiconductor industry, their systems can be found in advanced wafer processing equipment, such as physical vapor deposition (PVD) and implant systems. More information can be found at: http//www.genvactech.com.